Suspended ladder BG silicon sensor for high amplitude sensitivity

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研究成果: Conference contribution

本文言語	English
ホスト出版物のタイトル	JSAP-OSA Joint Symposia, JSAP 2021
出版社	Optica Publishing Group (formerly OSA)
ISBN（電子版）	9781557528209
出版ステータス	Published - 2021
イベント	JSAP-OSA Joint Symposia, JSAP 2021 - Virtual, Online, United States 継続期間: 2021 8月 26 → …

名前	Optics InfoBase Conference Papers

ASJC Scopus subject areas

@inproceedings{9a4bb3e7967f4f82a4cfa45c6b837122,

title = "Suspended ladder BG silicon sensor for high amplitude sensitivity",

author = "Siim Heinsalu and Yuichi Matsushima and Hiroshi Ishikawa and Katsuyuki Utaka",

year = "2021",

language = "English",

series = "Optics InfoBase Conference Papers",

publisher = "Optica Publishing Group (formerly OSA)",

booktitle = "JSAP-OSA Joint Symposia, JSAP 2021",

note = "JSAP-OSA Joint Symposia, JSAP 2021 ; Conference date: 26-08-2021",

}

TY - GEN

T1 - Suspended ladder BG silicon sensor for high amplitude sensitivity

AU - Heinsalu, Siim

AU - Matsushima, Yuichi

AU - Ishikawa, Hiroshi

AU - Utaka, Katsuyuki

PY - 2021

Y1 - 2021

UR - http://www.scopus.com/inward/record.url?scp=85130309911&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85130309911&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:85130309911

T3 - Optics InfoBase Conference Papers

BT - JSAP-OSA Joint Symposia, JSAP 2021

PB - Optica Publishing Group (formerly OSA)

T2 - JSAP-OSA Joint Symposia, JSAP 2021

Y2 - 26 August 2021

ER -