TEM observation of microstructures in RF-sputtered Sm-Fe magnetic thin films

Hong Sun*, Yutaka Itoh, Kenji Hanafusa, Kazuhito Kamei, Toshiro Tomida

*この研究の対応する著者

研究成果: Article査読

抄録

The planar-view and cross-sectional microstructures of binary Sm-Fe magnetic thin films deposited on quartz glass substrates by the RF-sputtering method are investigated using a transmission electron microscope (TEM). The cross-sectional micrographs and TEM diffraction patterns show decent columnar structures in the films and special crystallographic orientations. The magnetic properties of Sm-Fe thin films can also be well explained by their microstructural characteristics.

本文言語English
ページ(範囲)458-460
ページ数3
ジャーナルJournal of Electron Microscopy
45
5
出版ステータスPublished - 1996
外部発表はい

ASJC Scopus subject areas

  • 器械工学

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