抄録
Transmission electron microscopy (TEM) was used to study the interfacial microstructures of anodic-bonded Si/glass. The anodic bonding mechanism, in which oxygen diffused into silicon from a sodium-depleted region, was analyzed. Amorphous silicon oxide was formed during diffusion that accounted for the bond formation. The ion-migrating processes within the sodium-depleted region was found to be complicated.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 577-582 |
| ページ数 | 6 |
| ジャーナル | Scripta Materialia |
| 巻 | 47 |
| 号 | 9 |
| DOI | |
| 出版ステータス | Published - 2002 11月 1 |
| 外部発表 | はい |
ASJC Scopus subject areas
- 材料科学（全般）
- 凝縮系物理学
- 材料力学
- 機械工学
- 金属および合金