The effects of UV irradiation on titania deposition from titanium tetra-isopropoxide

Yasuyuki Egashira; Masato Sugimachi; Kouichi Nishizawa; Kazunobu Saito; Toshio Ohsawa; Hiroshi Komiyama

doi:10.1016/0169-4332(94)90442-1

The effects of UV irradiation on titania deposition from titanium tetra-isopropoxide

Yasuyuki Egashira^*, Masato Sugimachi, Kouichi Nishizawa, Kazunobu Saito, Toshio Ohsawa, Hiroshi Komiyama

^*この研究の対応する著者

研究成果: Article › 査読

4 被引用数 (Scopus)

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The influence of UV irradiation on the deposition of titania from titanium tetra-isopropoxide (TTIP) under reduced pressure was studied. It was found that UV irradiation accelerates the titania growth rate by a factor of 2-3 in the temperature range of 573 to 623 K. The coverage quality of micron-size trenches in the cases with and without UV irradiation indicates the role of the photo-enhanced surface reaction. The threshold wavelength of 380 nm which is equivalent to the energy gap of anatase indicates strongly that band-to-band excitation is responsible for the photo-enhanced surface reaction.

本文言語	English
ページ（範囲）	389-392
ページ数	4
ジャーナル	Applied Surface Science
巻	79-80
号	C
DOI	https://doi.org/10.1016/0169-4332(94)90442-1
出版ステータス	Published - 1994 5月 2
外部発表	はい

ASJC Scopus subject areas

表面、皮膜および薄膜

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10.1016/0169-4332(94)90442-1

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abstract = "The influence of UV irradiation on the deposition of titania from titanium tetra-isopropoxide (TTIP) under reduced pressure was studied. It was found that UV irradiation accelerates the titania growth rate by a factor of 2-3 in the temperature range of 573 to 623 K. The coverage quality of micron-size trenches in the cases with and without UV irradiation indicates the role of the photo-enhanced surface reaction. The threshold wavelength of 380 nm which is equivalent to the energy gap of anatase indicates strongly that band-to-band excitation is responsible for the photo-enhanced surface reaction.",

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T1 - The effects of UV irradiation on titania deposition from titanium tetra-isopropoxide

AU - Egashira, Yasuyuki

AU - Sugimachi, Masato

AU - Nishizawa, Kouichi

AU - Saito, Kazunobu

AU - Ohsawa, Toshio

AU - Komiyama, Hiroshi

PY - 1994/5/2

Y1 - 1994/5/2

N2 - The influence of UV irradiation on the deposition of titania from titanium tetra-isopropoxide (TTIP) under reduced pressure was studied. It was found that UV irradiation accelerates the titania growth rate by a factor of 2-3 in the temperature range of 573 to 623 K. The coverage quality of micron-size trenches in the cases with and without UV irradiation indicates the role of the photo-enhanced surface reaction. The threshold wavelength of 380 nm which is equivalent to the energy gap of anatase indicates strongly that band-to-band excitation is responsible for the photo-enhanced surface reaction.

AB - The influence of UV irradiation on the deposition of titania from titanium tetra-isopropoxide (TTIP) under reduced pressure was studied. It was found that UV irradiation accelerates the titania growth rate by a factor of 2-3 in the temperature range of 573 to 623 K. The coverage quality of micron-size trenches in the cases with and without UV irradiation indicates the role of the photo-enhanced surface reaction. The threshold wavelength of 380 nm which is equivalent to the energy gap of anatase indicates strongly that band-to-band excitation is responsible for the photo-enhanced surface reaction.

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VL - 79-80

SP - 389

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JO - Applied Surface Science

JF - Applied Surface Science

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The effects of UV irradiation on titania deposition from titanium tetra-isopropoxide

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