Triaxial force measurement cantilever by sidewall-doping with rapid thermal diffusion

Yuichiro Aoyama; Nguyen Binh-Khiem; Kentaro Noda; Yusuke Takei; Tetsuo Kan; Eiji Iwase; Kiyoshi Matsumoto; Isao Shimoyama

doi:10.1109/MEMSYS.2010.5442332

Triaxial force measurement cantilever by sidewall-doping with rapid thermal diffusion

Yuichiro Aoyama^*, Nguyen Binh-Khiem, Kentaro Noda, Yusuke Takei, Tetsuo Kan, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

^*この研究の対応する著者

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

We propose a triaxial force measurement cantilever with piezoresistors fabricated by rapid thermal diffusion sidewall-doping. The device is developed as a tool for applying quantitative mechanical stimuli to cells and measuring their mechanical properties at the same time. The device consists of a sensing tip, two sensing beams, and four wiring beams. We form piezoresistors on the surface of the sensing tip and the sidewalls of the two sensing beams. We confirmed that our device was able to measure triaxial forces. The displacement sensitivities of the device were 1.59×10^-3 μm^-1, 1.18×10^-3 μm^-1 and 3.26×10^-4 μm^-1 for x, y, and z-direction, respectively.

本文言語	English
ホスト出版物のタイトル	MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
ページ	619-622
ページ数	4
DOI	https://doi.org/10.1109/MEMSYS.2010.5442332
出版ステータス	Published - 2010 6月 1
外部発表	はい
イベント	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China 継続期間: 2010 1月 24 → 2010 1月 28

出版物シリーズ

名前	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN（印刷版）	1084-6999

Conference

Conference	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
国/地域	China
City	Hong Kong
Period	10/1/24 → 10/1/28

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
凝縮系物理学
機械工学
電子工学および電気工学

文献へのアクセス

10.1109/MEMSYS.2010.5442332

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引用スタイル

Aoyama, Y., Binh-Khiem, N., Noda, K., Takei, Y., Kan, T., Iwase, E., Matsumoto, K., & Shimoyama, I. (2010). Triaxial force measurement cantilever by sidewall-doping with rapid thermal diffusion. In MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest (pp. 619-622). 記事 5442332 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2010.5442332

Triaxial force measurement cantilever by sidewall-doping with rapid thermal diffusion. / Aoyama, Yuichiro; Binh-Khiem, Nguyen; Noda, Kentaro その他.
MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. 2010. p. 619-622 5442332 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

研究成果: Conference contribution

Aoyama, Y, Binh-Khiem, N, Noda, K, Takei, Y, Kan, T, Iwase, E, Matsumoto, K & Shimoyama, I 2010, Triaxial force measurement cantilever by sidewall-doping with rapid thermal diffusion. in MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest., 5442332, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 619-622, 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, Hong Kong, China, 10/1/24. https://doi.org/10.1109/MEMSYS.2010.5442332

Aoyama Y, Binh-Khiem N, Noda K, Takei Y, Kan T, Iwase E その他. Triaxial force measurement cantilever by sidewall-doping with rapid thermal diffusion. In MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. 2010. p. 619-622. 5442332. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2010.5442332

Aoyama, Yuichiro ; Binh-Khiem, Nguyen ; Noda, Kentaro その他. / Triaxial force measurement cantilever by sidewall-doping with rapid thermal diffusion. MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. 2010. pp. 619-622 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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abstract = "We propose a triaxial force measurement cantilever with piezoresistors fabricated by rapid thermal diffusion sidewall-doping. The device is developed as a tool for applying quantitative mechanical stimuli to cells and measuring their mechanical properties at the same time. The device consists of a sensing tip, two sensing beams, and four wiring beams. We form piezoresistors on the surface of the sensing tip and the sidewalls of the two sensing beams. We confirmed that our device was able to measure triaxial forces. The displacement sensitivities of the device were 1.59×10-3 μm-1, 1.18×10-3 μm-1 and 3.26×10-4 μm-1 for x, y, and z-direction, respectively.",

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AU - Kan, Tetsuo

AU - Iwase, Eiji

AU - Matsumoto, Kiyoshi

AU - Shimoyama, Isao

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AB - We propose a triaxial force measurement cantilever with piezoresistors fabricated by rapid thermal diffusion sidewall-doping. The device is developed as a tool for applying quantitative mechanical stimuli to cells and measuring their mechanical properties at the same time. The device consists of a sensing tip, two sensing beams, and four wiring beams. We form piezoresistors on the surface of the sensing tip and the sidewalls of the two sensing beams. We confirmed that our device was able to measure triaxial forces. The displacement sensitivities of the device were 1.59×10-3 μm-1, 1.18×10-3 μm-1 and 3.26×10-4 μm-1 for x, y, and z-direction, respectively.

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Triaxial force measurement cantilever by sidewall-doping with rapid thermal diffusion

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