TY - JOUR
T1 - Tribological behavior of diamond-like carbon produced by rf-PCVD based on energetic evaluation
AU - Yamamoto, Shuji
AU - Kawana, Atsuo
AU - Masuda, Chitoshi
PY - 2013/12/15
Y1 - 2013/12/15
N2 - Two types of diamond-like carbon (DLC) were evaluated for their tribological behavior in terms of the tribometer input energy. The DLC samples were prepared from methane (denoted DLC[CH4]) or benzene (denoted DLC[C6H6]) as a gas source on tungsten-carbide (WC) substrates by radio-frequency plasma chemical vapor deposition (rf-PCVD). The hydrogen contents of the DLCs were measured by Elastic Recoil Detection Analysis (ERDA). The DLC structures were investigated by Raman spectrometry and X-ray photoelectron spectroscopy (XPS). The basic mechanical properties, such as the hardness and the Young's modulus, were obtained by a nano-indenter. The DLC films against alumina were tribo-tested by a ball-on-disk. The input energy was calculated using the applied load, the friction coefficient, and the sliding distance in each tribo-test. The wear behavior of the DLC[CH4] sample was better than that of the DLC[C6H6], even though the hardness of DLC[CH4] was lower than that of DLC[C6H6]. The wear loss of DLC[CH4] and DLC[C6H6] was evaluated by the input energy, and the wear resistance difference of the DLCs was characterized in terms of the input energy.
AB - Two types of diamond-like carbon (DLC) were evaluated for their tribological behavior in terms of the tribometer input energy. The DLC samples were prepared from methane (denoted DLC[CH4]) or benzene (denoted DLC[C6H6]) as a gas source on tungsten-carbide (WC) substrates by radio-frequency plasma chemical vapor deposition (rf-PCVD). The hydrogen contents of the DLCs were measured by Elastic Recoil Detection Analysis (ERDA). The DLC structures were investigated by Raman spectrometry and X-ray photoelectron spectroscopy (XPS). The basic mechanical properties, such as the hardness and the Young's modulus, were obtained by a nano-indenter. The DLC films against alumina were tribo-tested by a ball-on-disk. The input energy was calculated using the applied load, the friction coefficient, and the sliding distance in each tribo-test. The wear behavior of the DLC[CH4] sample was better than that of the DLC[C6H6], even though the hardness of DLC[CH4] was lower than that of DLC[C6H6]. The wear loss of DLC[CH4] and DLC[C6H6] was evaluated by the input energy, and the wear resistance difference of the DLCs was characterized in terms of the input energy.
KW - Diamond-like carbon
KW - Hydrogen contents
KW - Input energy
KW - Wear loss
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U2 - 10.1016/j.surfcoat.2013.10.037
DO - 10.1016/j.surfcoat.2013.10.037
M3 - Article
AN - SCOPUS:84888835555
SN - 0257-8972
VL - 236
SP - 457
EP - 464
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
ER -