Tribological behavior of diamond-like carbon produced by rf-PCVD based on energetic evaluation

Shuji Yamamoto*, Atsuo Kawana, Chitoshi Masuda


研究成果: Article査読

14 被引用数 (Scopus)


Two types of diamond-like carbon (DLC) were evaluated for their tribological behavior in terms of the tribometer input energy. The DLC samples were prepared from methane (denoted DLC[CH4]) or benzene (denoted DLC[C6H6]) as a gas source on tungsten-carbide (WC) substrates by radio-frequency plasma chemical vapor deposition (rf-PCVD). The hydrogen contents of the DLCs were measured by Elastic Recoil Detection Analysis (ERDA). The DLC structures were investigated by Raman spectrometry and X-ray photoelectron spectroscopy (XPS). The basic mechanical properties, such as the hardness and the Young's modulus, were obtained by a nano-indenter. The DLC films against alumina were tribo-tested by a ball-on-disk. The input energy was calculated using the applied load, the friction coefficient, and the sliding distance in each tribo-test. The wear behavior of the DLC[CH4] sample was better than that of the DLC[C6H6], even though the hardness of DLC[CH4] was lower than that of DLC[C6H6]. The wear loss of DLC[CH4] and DLC[C6H6] was evaluated by the input energy, and the wear resistance difference of the DLCs was characterized in terms of the input energy.

ジャーナルSurface and Coatings Technology
出版ステータスPublished - 2013 12月 15

ASJC Scopus subject areas

  • 化学 (全般)
  • 凝縮系物理学
  • 材料化学
  • 表面、皮膜および薄膜
  • 表面および界面


「Tribological behavior of diamond-like carbon produced by rf-PCVD based on energetic evaluation」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。