Ultrathin Si-PD design with enhanced guided-mode resonance through slanted surface-relief gratings

Weinan Feng*, Jiangtao Ma, Makoto Tsubokawa

*この研究の対応する著者

研究成果: Article査読

抄録

We propose a new, to the best of our knowledge, surface-illuminated Si photodetector (PD) structure with slanted surface-relief grating that solves issues of low sensitivity to near-infrared (NIR) light and a trade-off between absorption layer thickness and high-speed response. The slanted grating, composed of tilted Si and SiO2 arrays, efficiently deflects normally incident photons. When coupled with the lateral quasi-propagating mode in the absorption layer with a circular resonator shape, the photon lifetime is dramatically extended, resulting in increased absorption of NIR photons. Simulations have confirmed that even an absorption layer as thin as 300 nm can achieve an extremely high absorption of 29.2% at a wavelength of 1012 nm. We believe this innovative design can play a crucial role in the design of thin and high-speed PDs.

本文言語English
ページ(範囲)2274-2277
ページ数4
ジャーナルOptics Letters
50
7
DOI
出版ステータスPublished - 2025 4月 1

ASJC Scopus subject areas

  • 原子分子物理学および光学

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