Use of EN(E) spectra for quantitative AES analysis of AuCu alloys

S. Ichimura*, T. Koshikawa, T. Sekine, K. Goto, H. Shimizu


研究成果: Article査読

14 被引用数 (Scopus)


The possibility of quantitative AES analysis using the whole EN(E) spectrum was examined for AuCu alloy samples. The EN(E) spectrum was measured under φ = 0° (normal) incidence of 10 keV electrons for the Au–44 at% Cu sample, and under φ = 0°, 30°, and 45° incidence of 10 keV primary electrons for the Au–20 at% Cu sample. Those spectra were compared with spectra which were obtained by linear combination of pure Au and Cu spectra measured under the same experimental conditions. Both measured and synthesized spectra coincided very well in the energy region lower than 1000 eV, except the region of slow secondary electrons. The results indicate that energy distribution of backscattered electrons of the AuCu alloy can be estimated well by linear combinations of pure sample spectra. They also indicate that, by comparison of the shape of the measured EN(E) spectrum with the synthesized one, the surface composition of the AuCu alloy sample can be estimated with reasonable accuracy (several % error).

ジャーナルSurface and Interface Analysis
出版ステータスPublished - 1988 1月

ASJC Scopus subject areas

  • 化学 (全般)
  • 凝縮系物理学
  • 表面および界面
  • 表面、皮膜および薄膜
  • 材料化学


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