Vacuum ultraviolet irradiation treatment for reducing goldgold bonding temperature

Engineering & Materials Science

• Irradiation 100%
• Vacuum 86%
• Atomic force microscopy 41%
• X ray photoelectron spectroscopy 39%
• Temperature 39%
• Shear strength 31%
• Impurities 31%
• Oxygen 26%
• Scanning electron microscopy 25%
• Carbon 24%
• Cracks 21%
• Gases 18%

Chemical Compounds

• Ultraviolet Irradiation 87%
• Vacuum 77%
• Shear Strength 56%
• Atomic Force Microscopy 38%
• X-Ray Photoelectron Spectroscopy 34%
• Surface 31%
• Scanning Electron Microscopy 29%
• Gas 25%
• Dioxygen 23%
• Amount 20%

Physics & Astronomy

• irradiation 62%
• vacuum 61%
• temperature 28%
• shear strength 27%
• contaminants 25%
• voids 21%
• photoelectron spectroscopy 20%
• cracks 18%
• atomic force microscopy 18%
• damage 17%
• carbon 16%
• scanning electron microscopy 15%
• oxygen 14%
• gases 12%
• x rays 10%