Vacuum ultraviolet (VUV) and vapor-combined surface modification for hybrid bonding at low temperature and atmospheric pressure

Engineering & Materials Science

• Atmospheric pressure 100%
• Surface treatment 93%
• Vapors 79%
• Vacuum 78%
• Hydrogen bonds 61%
• Dehydration 55%
• Hydrates 49%
• Water vapor 49%
• Irradiation 45%
• Impurities 42%
• Adhesion 40%
• Semiconductor materials 39%
• Oxides 38%
• Temperature 35%
• Hydrogen 35%
• Heating 31%