@inproceedings{5dc6837d71854937917d3262b595f573,
title = "Variation of optical properties by the crystalline phase transition of polycrystalline silicon",
abstract = "We studied a characteristics trimming technique in Si photonic-wire waveguide devices. In order to trimming device properties, we utilized refractive index change of amorphous silicon when it crystallizes by annealing. We fabricated MZI devices with amorphous silicon waveguides, and demonstrated the trimming of the transmission spectra by thermal annealing and also laser annealing after finished the device fabrication process. We observed 5.2 % of the refractive index change owing to crystallization by annealing in a nitrogen atmosphere and 5.8% of change by laser crystallization.",
keywords = "Amorphous silicon, Laser annealing, Polycrystalline silicon, Silicon photonic-wire waveguide",
author = "Hidenori Iwata and Tomohiro Kita and Hirohito Yamada",
year = "2011",
month = apr,
day = "11",
doi = "10.1117/12.874435",
language = "English",
isbn = "9780819484802",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Silicon Photonics VI",
note = "Silicon Photonics VI ; Conference date: 23-01-2011 Through 26-01-2011",
}