抄録
A resonant cavity waveguide device structure is reported which incorporates a grating structure to couple the vertical incident light into the waveguide and uses Bragg grating to constitute a resonator. Two types of grating are fabricated simultaneously on a surface of thin Si waveguide to gain high sensor sensitivity for the refractive index change measurement.
本文言語 | English |
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ページ(範囲) | 1078-1080 |
ページ数 | 3 |
ジャーナル | Electronics Letters |
巻 | 46 |
号 | 15 |
DOI | |
出版ステータス | Published - 2010 7月 22 |
ASJC Scopus subject areas
- 電子工学および電気工学