抄録
Vertically aligned carbon nanotubes (CNTs) were synthesized from Ni nanoparticles prepared by ion implantation. Ni ions were implanted at 30 keV into thermally grown SiO2 substrates using a focused-ion-beam. High-density nanoparticle formation was investigated with high doses up to 5.0 × 1017 ions/cm2. Dense Ni nanoparticles in the order of 1011-1012 cm- 2 were obtained on a SiO2 substrate, and the particle density and diameter were controlled by post-implantation annealing. Particles annealed at 700 °C led to vertically aligned CNTs. Interestingly, catalysts were longer along the vertical axis and the lower half of the Ni particle was buried in SiO2.
本文言語 | English |
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ページ(範囲) | 1443-1446 |
ページ数 | 4 |
ジャーナル | Diamond and Related Materials |
巻 | 17 |
号 | 7-10 |
DOI | |
出版ステータス | Published - 2008 7月 |
ASJC Scopus subject areas
- 電子材料、光学材料、および磁性材料
- 化学 (全般)
- 機械工学
- 材料化学
- 電子工学および電気工学