@article{028b44d465d547d5bd7a56717baad9fa,
title = "X-ray diffraction profiles of Si nanowires with trapezoidal cross-sections",
abstract = "Comparisons of the experimental and calculated X-ray diffraction profiles have been made for Si nanowires with trapezoidal cross-sections. Examined samples are periodically arranged nanowires prepared on a silicon-on-insulator wafer by electron-beam lithography, so that they are isolated from Si substrate. The nanowire periodicity gives rise to diffractions at additional reciprocal lattice points, which we employ to avoid the mixture of the diffraction from the Si substrate. The experimental diffraction profiles are found to be in good agreement with the square modulus of the Fourier transform of the trapezoidal cross-sections determined from transmission electron micrographs.",
keywords = "Fourier transform, Si nanowire, Trapezoidal cross-section, X-ray diffraction",
author = "Teruaki Takeuchi and Kosuke Tatsumura and Iwao Ohdomari and Takayoshi Shimura and Masao Nagase",
note = "Funding Information: The authors would like to thank Tomoyuki Tange for X-ray diffraction experiments. This work was supported by a Grant-in-Aid for COE Research “Molecular Nano-Engineering” from MEXT, Japan and partly by the JSPS Research for the Future Program under the Project “Ultimate Characterization Technique of SOI Wafer for the Nano-Scale LSI Devices.” The synchrotron radiation experiments were performed at the Photon Factory (Proposal No. 2000G101 and Proposal No. 2004G220) and at the SPring-8 with the approval of the Japan Synchrotron Radiation Research Institute (JASRI) (Proposal No. 2000B0068-ND-np).",
year = "2011",
month = jul,
day = "1",
doi = "10.1016/j.physb.2011.03.064",
language = "English",
volume = "406",
pages = "2559--2564",
journal = "Physica B: Condensed Matter",
issn = "0921-4526",
publisher = "Elsevier",
number = "13",
}